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发明名称	VACUUM SPUTTERING CATHODE
摘要
申请公布号	PL207112(B1)	申请公布日期	2010.11.30
申请号	PL20030377089	申请日期	2003.07.08
申请人	TECMACHINE	发明人	AULAGNER MICHEL;LABALME LIONEL
分类号	H01J37/34;C23C14/34;H01J37/32	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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