发明名称 |
Polishing article with integrated window stripe |
摘要 |
A polishing article includes a polishing layer having a polishing surface and a solid light-transmissive window in the polishing layer, the window having a first non-linear edge that extends along a first axis parallel to the polishing surface, the first non-linear edge including a plurality of projections and a plurality of recesses extending parallel to the polishing surface and disposed in an alternating pattern along the first axis.
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申请公布号 |
US7841925(B2) |
申请公布日期 |
2010.11.30 |
申请号 |
US20090488437 |
申请日期 |
2009.06.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
MENK GREGORY E.;MCREYNOLDS PETER;RONDUM ERIK S.;IYER ANAND N.;PRABHU GOPALAKRISHNA B.;LEUNG GARLEN C. |
分类号 |
B24B49/12;B24B37/20;H01L21/304 |
主分类号 |
B24B49/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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