发明名称 Polishing article with integrated window stripe
摘要 A polishing article includes a polishing layer having a polishing surface and a solid light-transmissive window in the polishing layer, the window having a first non-linear edge that extends along a first axis parallel to the polishing surface, the first non-linear edge including a plurality of projections and a plurality of recesses extending parallel to the polishing surface and disposed in an alternating pattern along the first axis.
申请公布号 US7841925(B2) 申请公布日期 2010.11.30
申请号 US20090488437 申请日期 2009.06.19
申请人 APPLIED MATERIALS, INC. 发明人 MENK GREGORY E.;MCREYNOLDS PETER;RONDUM ERIK S.;IYER ANAND N.;PRABHU GOPALAKRISHNA B.;LEUNG GARLEN C.
分类号 B24B49/12;B24B37/20;H01L21/304 主分类号 B24B49/12
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