发明名称 |
APPARATUS OF SUPPLYING CHEMICAL LIQUID |
摘要 |
PURPOSE: A chemical supplying apparatus is provided to form uniform supply pressure by preventing a pressure loss due to bubbles. CONSTITUTION: A supply line(110) flows the chemical for processing a substrate. At least one supply tank is connected to a supply line and stores the chemical. A bubble removing unit(130) is installed on a supply line. The bubble removing unit is installed on the supply line and removes the bubble inside the chemical.
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申请公布号 |
KR20100124448(A) |
申请公布日期 |
2010.11.29 |
申请号 |
KR20090043454 |
申请日期 |
2009.05.19 |
申请人 |
SEMES CO., LTD. |
发明人 |
YU, JAE HYEOK;OH, RAE TAEK |
分类号 |
H01L21/306 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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