发明名称 STACKED NON-VOLATILE MEMORY WITH SILICON CARBIDE-BASED AMORPHOUS SILICON THIN FILM TRANSISTORS AND MANUFACTURING METHOD THEREOF
摘要 <p>A memory includes a first memory cell and a second memory cell formed over the first memory cell. Each of the first memory cell and the second memory cell includes a channel region comprising silicon and carbon, a control gate, and a dielectric stack between the channel region and the control gate. A carbon content of the channel region of the second memory cell is less than a carbon content of the channel region of the first memory cell.</p>
申请公布号 KR100997350(B1) 申请公布日期 2010.11.29
申请号 KR20087025338 申请日期 2007.03.15
申请人 发明人
分类号 H01L27/115;H01L21/8247;H01L29/786 主分类号 H01L27/115
代理机构 代理人
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