CATHODE TARGET FOR SPRAYING AND METHOD OF ITS FABRICATION

摘要

FIELD: metallurgy. ^ SUBSTANCE: proposed method comprises producing preform of cathode target with preset chemical composition and its machining to preset geometrical sizes. Note here that for this, melted metal is poured into ceramic mould to produce electrode ingot of cylindrical shape. Then said ingot is fused by plasma to produce spherical granules with diametre varying from 50 to 400 mcm. Preset amount of spherical granules is filled in circular capsule under vacuum to produce target with cavity. Said capsule is sealed and subjected to hipping. Then capsule is unsealed and preform is cleaned by removing capsule components. Cathode target is made from alloy based on nickel or cobalt. ^ EFFECT: stable geometrical sizes of target preform. ^ 12 cl, 1 tbl