发明名称 REACTOR
摘要 FIELD: power industry. ^ SUBSTANCE: reactor includes vacuum chamber (1) having the first end wall (2) with mounting manhole, the second end wall (3) with rear flange, side walls/housing (4), which connect the first and the second end walls (2, 3), and at least one fitting (5) of material of source for source material supply to vacuum chamber (1) of reactor. At least one of fittings (5) of source material is located in side wall/housing (4) of vacuum chamber (1) of reactor. ^ EFFECT: visual inspection is provided in reactor, and reactor design is simplified. ^ 16 cl
申请公布号 RU2405063(C2) 申请公布日期 2010.11.27
申请号 RU20070137545 申请日期 2006.04.21
申请人 BENEK OJ 发明人 SOININEN PEKKA
分类号 C23C;C23C16/44;C23C16/455;C23C16/54;C30B25/08;H01L;H01L21/314 主分类号 C23C
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