ONE OF FLEXIBLE DISPLAY ORGANIC LIGHT EMITTING DISPLAY PANEL AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A substrate processing method of a flexible display device is provided to remarkably improve the adhesive force between a plastic substrate and an ITO film by depositing a second ITO after improving the adhesive force. CONSTITUTION: A barrier film is deposited on a plastic substrate(10) for the protection of humidity. A first ITO thin film(20) is thinly deposited on the barrier film. The adhesive force between the first ITO thin film and the plastic substrate is improved by processing O2 plasma on the first ITO thin film. A second ITO thin film is deposited on the plasma processed first ITO thin film.