| 摘要 |
PURPOSE: A waterwheel-type etching module and an etching system thereof are provided to prevent a product failure due to the nozzle jam by completely removing the jam phenomenon of a spray nozzle. CONSTITUTION: An etchant storage part(100) stores an etchant inside. An opening(110) is formed in an outer circumference in the etchant storage part. A rotation module is included inside the etchant storage part. The rotation module discharges the etchant to the opening through a rotation process.
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