| 摘要 |
The present invention relates to a method for processing an object with miniaturized structures, having the steps of:
a) feeding the reaction gas onto a surface of the object;
b) processing the object by directing an energetic beam onto a processing site on the surface of the object, in order to deposit material on the object or to remove material from the object,
c) scanning the surface of the object with the energetic beam and detecting interaction products of the energetic beam with the object, and
d) deciding whether the processing of the object must be continued or can be terminated with the aid of information which is obtained from the detected interaction products of the energetic beam with the object,
e) in which the processing of the object in step b) is performed with a first set of beam parameters of the beam, and the scanning of the surface in step c) is performed with a second set of beam parameters of the energetic beam, and the second set of beam parameters deviates from the first set of the energetic beam parameters. |
