FLUID DISTRIBUTION APPARATUS AND FLUID DISTRIBUTION METHOD

摘要

PURPOSE: A fluid distributing apparatus and a fluid distributing method are provided to secure a uniform processing characteristic regardless of spaces by including pre-fluid distributing parts supplying different amounts of fluid. CONSTITUTION: An optimal processing position is selected using pre-distributing parts which include pre-unit regions. A fluid distributing part(201) is obtained by transferring the structure of pre-fluid distributing parts to correspond to the optical processing position. The pre-unit regions include split regions supplying different amount of fluid. A substrate(260) is processed using the fluid distributing part.