SEMICONDUCTOR DEVICE EMPOLYING AN OXIDE LAYER PREPARED BY ECR-ALD, PREPARATION METHOD THEREOF AND THE USES THEROF,申请号KR20080035103-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE EMPOLYING AN OXIDE LAYER PREPARED BY ECR-ALD, PREPARATION METHOD THEREOF AND THE USES THEROF
摘要
申请公布号	KR100996884(B1)	申请公布日期	2010.11.26
申请号	KR20080035103	申请日期	2008.04.16
申请人		发明人
分类号	H01L27/118;H01L21/205	主分类号	H01L27/118
代理机构		代理人
主权项
地址

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