| 摘要 |
PURPOSE: A composition for a thin film heating element is provided to form a thin film with a uniform thickness based on a cheap tin oxide compound, and to reduce the matter property deviation. CONSTITUTION: A composition for a thin film heating element contains water-soluble metal salt dissolved to distilled water or deionized water, oxalic acid, and ammonia. The water-soluble metal salt contains 70~99wt% of tin salt, and 1~30wt% of element selected from the group consisting of Sb, Zn, Ga, Si, Ti, and Cr. The ammonia is added as an ammonia solution.
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