FLEXIBLE SUBSRRATES ARE USED IN TOUCH SCREEN ON THE WAY TO FORMATION OF POLYMER FORMATION AND TRANSPARENT ITO ELECTRODE

摘要

PURPOSE: A polymer and a transparent electrode ITO formation method of a flexible substrate used for a touch screen are provided to suppress cracking of ITO thin film due to a post heat processing by forming buffer polymer having heat resistance. CONSTITUTION: A flexible substrate(10) used for the formation of a transparent electrode of a touch screen or a display is prepared. To remove the moisture and impurity of the flexible substrate, a heat processing or plasma processing is performed by N2 or H2 or NH3 gas. A buffer layer polymer(20) having 250 degree heat resistance is evaporated on a flexible substrate which had a heat processing or plasma processing. The ITO(Indium Tin Oxide) thin film(30) is evaporated on the buffer layer polymer.