LUCENT PLASMA CRUCIBLE

摘要

For operation in the TMO1O mode at 2450MHz, a lucent crucible of quartz is 4.9cm in diameter and 2.1cm in length. A sealed plasma void is placed centrally on the central axis, with an antenna re-entrant at one end, but offset from the central axis of the crucible and close to the central void. Various TE-modus are also possible