发明名称 Vorrichtung und Verfahren zum Herstellen eines Einkristalls
摘要 <p>A single-crystal manufacturing apparatus comprises a chamber, a crucible in the chamber, a heater arranged around the crucible, a lifting mechanism for lifting a seed crystal, and a guide passage for the seed crystal and a grown single crystal. In the single-crystal manufacturing apparatus, a material polycrystal contained the crucible is melted by a heater, and the seed crystal is made to contact the molten polycrystal and is lifted. The single-crystal manufacturing apparatus comprises a cylindrical quartz tube having a curved bottom portion, and a dome-shaped quartz plate. The curved bottom portion faces the crucible from the upper portion of the chamber through the guide passage. The quartz plate is arranged to enclose the quartz tube. The quartz tube has a reflecting structure for reflecting a heat ray from at least its bottom portion whereas the quartz plate has a reflecting structure for reflecting the heat ray to the crucible.</p>
申请公布号 DE112008003322(T5) 申请公布日期 2010.11.25
申请号 DE20081103322T 申请日期 2008.12.01
申请人 SHIN-ETSU HANDOTAI CO. LTD. 发明人 ABE, TAKAO
分类号 C30B29/06;C30B15/00 主分类号 C30B29/06
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