| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminate having an aluminum nitride monocrystalline layer reduced in crystal defect density and smooth in surface. SOLUTION: The method of manufacturing the laminate is characterized by comprising: the first growing step of supplying material gas onto a base substrate 1 such that the mole ratio of nitrogen atoms to aluminum atoms is at least 3,000 and not more than 7,000 to form a first aluminum nitride monocrystalline layer 2; and the second growing step of supplying the material gas onto the first aluminum nitride monocrystalline layer 2 such that the mole ratio of nitrogen atoms to aluminum atoms is less than 3,000 to form a second aluminum nitride monocrystalline layer 3. COPYRIGHT: (C)2011,JPO&INPIT
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