发明名称 IN LINE TEST CIRCUIT AND METHOD FOR DETERMINING INTERCONNNECT ELECTRICAL PROPERTIES AND INTEGRATED CIRCUIT INCORPORATING THE SAME
摘要 A test circuit for, and method of, determining electrical properties of an underlying interconnect layer and an overlying interconnect layer of an integrated circuit (IC) and an IC incorporating the test circuit or the method. In one embodiment, the test circuit includes a gate chain having a ring path and a stage. In one embodiment, the stage includes: (1) a underlying test segment in the underlying interconnect layer, (2) a overlying test segment in the overlying interconnect layer and (3) logic circuitry activatible after formation of the underlying interconnect layer and before formation of the overlying interconnect layer to place the underlying test segment in the ring path and further activatible after the formation of the overlying interconnect layer to substitute the overlying test segment for the underlying test segment in the ring path.
申请公布号 US2010297793(A1) 申请公布日期 2010.11.25
申请号 US20100850415 申请日期 2010.08.04
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 KULKARNI MAKARAND R.;MARSHALL ANDREW
分类号 H01L21/66 主分类号 H01L21/66
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