| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition having good sensitivity and the like. <P>SOLUTION: The radiation-sensitive resin composition includes an acid dissociable group-containing resin, a radiation-sensitive acid generator expressed by general formula of M<SP>+</SP>Z<SP>-</SP>(where M<SP>+</SP>represents an onium cation and Z<SP>-</SP>represents an anion expressed by general formula (1-1) or (1-2)), and a compound expressed by general formula (c1). In the formulae, R<SP>1</SP>to R<SP>5</SP>each represents an alkyl group having 1 to 20 carbon atoms with substitution of a fluorine atom, or the like; A represents a single bond or the like; and R<SP>6</SP>and R<SP>7</SP>each represents a hydrocarbon group having 1 to 25 carbon atoms, or the like. <P>COPYRIGHT: (C)2011,JPO&INPIT |
