METHOD OF MANUFACTURING OPTICAL WAVEGUIDE, OPTICAL WAVEGUIDE, OPTICAL ROUTING, PHOTOELECTRIC CONSOLIDATION SUBSTRATE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide: a method of manufacturing an optical waveguide having an excellent long term reliability; an optical waveguide; an optical routing; a photoelectric consolidation substrate; and an electronic equipment.

SOLUTION: The method of manufacturing the optical waveguide includes: a radiation step in which an active energy ray is selectively radiated on a first resin layer containing acid generating agent to form a part having a different refractive index; a neutralization step in which at least either one of acid components of the acid-generating agent contained in the first resin layer or the acid derived from the acid generating agent is neutralized after the radiation step. The optical waveguide is obtained by the method of manufacturing the optical waveguide. The optical routing includes the optical waveguide. The photoelectric consolidation substrate includes electric wiring and the optical routing. The electronic equipment includes the optical waveguide.

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