| 摘要 |
PROBLEM TO BE SOLVED: To provide a draining device that can efficiently remove moisture content in a solvent without the need of increasing the scale of a device and at a low running cost. SOLUTION: The draining device 1 that replaces water on the surface of a workpiece W using a solvent 100 is characterized in that it is equipped with: a draining tank 10 in which the solvent 100 is filled, and the workpiece W is immersed; a first water separation tank 20 which is connected to the draining tank 10 in such a manner that the solvent 100 in the draining tank 10 can flow in; a heater 23 which can heat the solvent 100 in the first water separation tank 20; and a distillation part 30 which is installed in the first water separation tank 20 so that steam of the solvent 100 heated in the first water separation tank 20 can flow in. COPYRIGHT: (C)2011,JPO&INPIT
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