| 摘要 |
To provide a plasma generator having plasma-generating zone of increased volume. A plasma generator 110 has a cylindrical casing 11 made of a sintered ceramic produced from alumina (Al2O3) as a raw material. The casing 11 has a slit-like gas inlet 11i and a plurality of cylindrical gas outlets 11o. From the gas inlet 11i to the top of the plasma-generating zone P, the slit width (the front-to-back direction with respect to the sheet of FIG. 2.A, and the left-to right direction in FIG. 2.B) is adjusted to 1 mm, and gas outlets 11o each having an inner diameter of 1 to 2 mm are formed in straight line along the longitudinal direction of the plasma-generating zone P. The plasma-generating zone P has a square cross-section normal to the longitudinal direction having a side of 2 to 5 mm. Each of the surfaces of the electrodes 2a, 2b facing each other has a plurality of recesses (hollow portions). An elevated voltage of about 9 kV obtained from a commercial AC voltage (60 Hz, 100 V) was applied to the electrodes 2a, 2b, to thereby supply a current of 20 mA. When argon gas was supplied through the gas inlet 11i, even in the case where the electrodes 2a, 2b were separated at a spacing of 4 cm, stable linear electric discharge was observed. |
