| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein, when fixing a plurality of unit substrates to a main substrate, irregularity of the height of the unit substrates is caused, leading to irregularity of the tips of probes. SOLUTION: In order to form one reference plane by the surfaces of the plurality of unit substrates using, as a reference, a surface of each unit substrate mounted with a probe, a reference base is disposed, the surface of each of the plurality of unit substrates is stuck to a reference surface of the reference base, and then the main substrate is fixed to the back side of each unit substrate. COPYRIGHT: (C)2011,JPO&INPIT |
