发明名称 |
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD |
摘要 |
A fine movement stage is driven by a controller, based on positional information of the fine movement stage in a measurement direction measured by a measurement system and correction information of a measurement error caused by a tilt of the fine movement stage included in the positional information. Accordingly, driving the fine movement stage with high precision becomes possible, which is not affected by a measurement error included in the positional information in a measurement direction of the measurement system that occurs due to a tilt of the fine movement stage.
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申请公布号 |
US2010296071(A1) |
申请公布日期 |
2010.11.25 |
申请号 |
US20100782310 |
申请日期 |
2010.05.18 |
申请人 |
NIKON CORPORATION |
发明人 |
SHIBAZAKI YUICHI |
分类号 |
G03B27/42;G02B5/18;G03B27/32 |
主分类号 |
G03B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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