发明名称 TUNNELING FIELD EFFECT TRANSISTOR SWITCH DEVICE
摘要 A tunneling field effect transistor (TFET) device includes a semiconductor substrate having a layer of relatively intermediate bandgap semiconductor material, a layer of relatively low bandgap semiconductor material overlying the layer of relatively intermediate bandgap semiconductor material, and a layer of relatively high bandgap semiconductor material overlying the layer of relatively low bandgap semiconductor material. The TFET device includes a source region, a drain region, and a channel region defined in the semiconductor substrate. The TFET device also has a gate structure overlying at least a portion of the channel region. The source region is highly doped with an impurity dopant having a first conductivity type, and the drain region is highly doped with an impurity dopant having a second conductivity type. The layer of relatively low bandgap semiconductor material promotes tunneling at a first junction between the source region and the channel region, and the layer of relatively high bandgap semiconductor material inhibits tunneling at a second junction between the source region and the channel region.
申请公布号 US2010295058(A1) 申请公布日期 2010.11.25
申请号 US20090468612 申请日期 2009.05.19
申请人 GLOBALFOUNDRIES INC. 发明人 CHO JIN
分类号 H01L31/0312 主分类号 H01L31/0312
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