| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact liquid metal coating apparatus having a simple structure, movable at high speed, and easy in maintenance. SOLUTION: The liquid metal coating apparatus 10 comprises: a storage chamber 20 for storing liquid metal 11; a storage container 17 having a first mouth part 18 which communicates with the storage container to suck the liquid metal into the storage container and to discharge the liquid metal sucked into the storage container, and a second mouth part 19 which communicates with the storage chamber to adjust the pressure in the storage chamber; a moving unit 23 having a vertical moving mechanism 24 which attachably/detachably supports the storage container and moves the storage container in the vertical direction; a pressure adjusting unit 26 which is connected to the second mouth part to adjust the pressure in the storage chamber; and a control unit 34 for driving the moving unit and the pressure adjusting unit. COPYRIGHT: (C)2011,JPO&INPIT |
