| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying device capable of sucking a substrate tray with a high probability. SOLUTION: The conveying device 2 includes: a conveying means 14 for making a suction body 22 suck the substrate tray 32 and conveying it at least to mount the substrate tray 32 on a mounting table 10 or to demount the substrate tray 32 from the mounting table 10; a detection means for detecting the suction state of the suction body 22; and a rotating mechanism 12 configured to rotate the mounting table 10 so that at least one of a plurality of suction bodies 22 shifts in a position with respect to the substrate tray 32 and to rotate the substrate tray 32 on the mounting table 10 when the detection means detects that the suction body 22 does not suck the substrate tray 32. COPYRIGHT: (C)2011,JPO&INPIT
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