| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for performing batch restoration over a whole plane of a substrate without causing shape differences, property differences of a defect correction portion and a normal portion and without performing local application, exposure, development, washing, and thermosetting in the restoration of a partition defective part of a flat panel display. SOLUTION: In a partition formed with the predetermined pattern on a substrate by performing a partition resin dispersion application on the substrate, an exposure, a development, a washing and a thermosetting, the partition defective part is restored by re-coating (applying) a solution, in which the same resin as that in the partition is distributed, over a whole substrate plane including a defective part of the partition for the defect detected by an inspection, by correcting alignment positions of the substrate and a reticle, by performing the re-exposure and the re-development in the partition pattern state at the same position, and by forming the partition, and by performing thermosetting of the partition. COPYRIGHT: (C)2011,JPO&INPIT
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