发明名称 |
NANOTUBES AND RELATED MANUFACTURING PROCESSES |
摘要 |
Nanotubes and related nanofabrication processes are described where wafer-scale approaches have been developed. The described processes can be used to produce single, vertically aligned tubes integrated into 3D nano-scale architectures. Moreover, fabrication processes to generate 3D nanoarchitectures are also described.
|
申请公布号 |
US2010297435(A1) |
申请公布日期 |
2010.11.25 |
申请号 |
US20100694235 |
申请日期 |
2010.01.26 |
申请人 |
KAUL ANUPAMA B;MEGERIAN KRIKOR G;VON ALLMEN PAUL A;BARON RICHARD L |
发明人 |
KAUL ANUPAMA B.;MEGERIAN KRIKOR G.;VON ALLMEN PAUL A.;BARON RICHARD L. |
分类号 |
C03C25/44;B01J37/34;C03C25/68;H05H1/34 |
主分类号 |
C03C25/44 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|