| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording medium, which cancels produced deterioration without giving damage to each layer, and can effectively improve property, since a surface of each layer deteriorates (is oxidized) inside a chamber in a period between deposition processes of respective layers, in a deposition device of an inline method. SOLUTION: In the method for manufacturing the magnetic recording medium which is configured by laminating a plurality of layers on a substrate, deposition of whichever of a plurality of layers is carried out on the substrate, bias is impressed on the substrate without carrying out deposition, and deposition of a following layer is carried out on the substrate. COPYRIGHT: (C)2011,JPO&INPIT |
