发明名称 |
Zusammensetzung eines Poliermittels, seine Herstellung und Verfahren zum Polieren |
摘要 |
A polishing compound containing cocoon-shaped silica particles and crystal silica particles, and water-soluble polymers including; at least one type selected from the groups including ammonium nitrate and ammonium acetate, and at least one type selected from methylcellulose, carboxymethylcellulose, hydroxyethylcellulose, and the group including carboxymethylcellulose. |
申请公布号 |
DE60143243(D1) |
申请公布日期 |
2010.11.25 |
申请号 |
DE2001643243 |
申请日期 |
2001.07.18 |
申请人 |
ADMATECHS CO. LTD.;RODEL NITTA CORP. |
发明人 |
SHIMAMOTO, HAJIME;ICHIKAWA, SHOJI;KONDO, KATSUMI;ABE, SUSUMU;TAKENOUCHI, KENJI |
分类号 |
B24B37/00;C09K3/14;B01D61/14;B01D63/02;C09G1/02;H01L21/304 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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