| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost piezoelectric element having excellent mass productivity by simplifying drive and detection circuit structures by improving the degree of freedom of the design while improving the SN ratio by suppressing deterioration of characteristics caused by an electric connection due to a capacitance between adjacent electrodes, and by simplifying a polarization process. <P>SOLUTION: The piezoelectric element includes three or more electromechanical transducers having a lower electrode 120, a polarized piezoelectric thin film 119 and an upper electrode, and provided on the same plane on one surface of an H-shaped or rectangular parallelepiped substrate 101, and is configured such that the direction of polarization of any one or more of the polarized piezoelectric thin films 119 of the electromechanical transducers, that is, polarization parts is opposite to the direction of the polarization parts of the other electromechanical transducers. The piezoelectric element excites a driving vibration mode in the in-plane and out-of-plane directions and detects a detection vibration mode in the in-plane and out-of-plane directions using a balanced driving circuit and/or a detection circuit. <P>COPYRIGHT: (C)2011,JPO&INPIT |
