| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum pump in which a side-channel-pump stage has an improved vacuum characteristic value and simultaneously a shape with which pump active parts can be easily manufactured. <P>SOLUTION: This vacuum pump includes a gas inlet, a gas outlet, and the side-channel-pump stage. The side-channel-pump stage includes an impeller provided with an outer circumference and at least one blade 402, and rotated. The blade includes a rear part 405 provided with an outer corner 408 positioned at rear in a motion direction 407. The blade includes a chamfer 406 at the outside corner of the rear part in order to improve vacuum characteristics with simple manufacturability. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
