| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser displacement gauge capable of easily measuring the thickness of a film to be measured. SOLUTION: The laser displacement gauge includes: a variable-wavelength laser light source 11; an axial chromatic aberration optical system 13; a photo-sensing part 14 for receiving a laser beam which has been reflected by the surface and back surface of the film SA to be measured, via the axial chromatic aberration optical system 13 and detecting the state of image formation of the laser beam in the surface and back surface of the film SA to be measured; and a control part 21 for controlling the variable-wavelength laser light source to change the wavelength of a laser beam to be outputted. On the basis of the wavelength of a laser beam in the case that the photo-sensing part 14 has detected the focusing of the laser beam in the surface and back surface of the film SA to be measured, the control part 21 determines the position hs of the surface of the film SA to be measured and the temporary position hbd of the back surface of the film SA to be measured to specify the temporary thickness Td of the film SA to be measured on the basis of the position hs of the surface and the temporary position hbd of the back surface. The control part 21 specifies the true thickness of the film SA to be measured on the basis of the file type of the film SA to be measured; the temporary position hbd of the back surface; and the temporary thickness Td. COPYRIGHT: (C)2011,JPO&INPIT
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