TEST SYSTEM AND PROBE APPARATUS,申请号KR20107021462-传众专利搜索

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发明名称	TEST SYSTEM AND PROBE APPARATUS
摘要
申请公布号	KR20100123883(A)	申请公布日期	2010.11.25
申请号	KR20107021462	申请日期	2008.04.25
申请人	ADVANTEST CORPORATION	发明人	UMEMURA YOSHIHARU;KOMOTO YOSHIO
分类号	H01L21/66;G01R31/28	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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