| 摘要 |
PROBLEM TO BE SOLVED: To prevent a heat treatment object from being cooled when it is transferred among heat treatment chambers, and to prevent the contamination of a transferring environment in a multi-chamber type heat treatment device. SOLUTION: The multi-chamber type heat treatment device has a transferring device 5 for transferring the heat treatment object X among a plurality of the heat treatment chambers, the transferring device 5 has a heat retaining means for retaining the heat of the heated heat treatment object X in the heat treatment chamber, and the heat retaining means has a heat insulating chamber 5h surrounding the heat treatment object X received in the transferring device 5, and a heater 5i disposed in the heat insulating chamber 5h. COPYRIGHT: (C)2011,JPO&INPIT |
