发明名称 TOOL, TOOL SET, AND METHOD FOR GAP CONFIRMATION AND THIN FILM FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a gap confirmation tool, capable of verifying the size of a gap across a pair of members which have surfaces facing each other, at an arbitrary location. SOLUTION: The gap confirmation tool includes both a head part 2 and a rod-like part 3, connected to the head part 2. In the head part 2 in its projected shape projected to a plane intersecting with the direction of extension of the rod-like part 3 at right angles, when the head part 2 is projected to the direction of extension of the rod-like part, the distance between two points farthest in linear terms from each other becomes a specified length, and the overall projected shape is contained within a virtual circle, having a radius equal to half the length of the regular length from the center between the two points. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010266360(A) 申请公布日期 2010.11.25
申请号 JP20090118566 申请日期 2009.05.15
申请人 SHARP CORP 发明人 ISHITSUBO KEI;KISHIMOTO KATSUSHI;ISSHIKI KAZUHIKO;NOZAKI JUNICHI;ABE TAKAHIRO;NAKAMURA YOSHINOBU;NASUNO YOSHIYUKI;INUZUKA HIROYUKI;FUJII MAKOTO;HARA YOSHINORI
分类号 G01B3/30;C23C16/50 主分类号 G01B3/30
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