| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lamination type gas sensor for exhaust gas improved in heat/shock resistance and durability reliability without especially deteriorating characteristics of an exhaust gas sensor. <P>SOLUTION: The lamination type gas sensor includes: a solid electrolyte layer (4) for keeping a lower electrode layer (3) interposed on one surface of a substrate (1); and an upper electrode layer (5) on the solid electrolyte layer (4). Also provided is a method of manufacturing the lamination type gas sensor. The substrate (1) is a dense substrate formed of at least one type of substrate material of a silicon nitride, silicon carbide, and an aluminum nitride; a thermal expansion buffer layer (8) is formed between at least one portion of the lower electrode (3) and the substrate (1), and the solid electrolyte layer (4) as needed; and a difference between the thermal coefficient of the expansion of the solid electrolyte layer (4) and that of the substrate (1) or the thermal expansion buffer layer (8) at least partially abutting on the solid electrolyte layer (4) is not larger than 5 ppm/°C. <P>COPYRIGHT: (C)2011,JPO&INPIT |
