FINE-PROCESSING AGENT AND FINE-PROCESSING METHOD

摘要

Provided is a fine-processing agent which, when fine-processing a laminated film stacked at least with a silicon dioxide film and/or a silicon nitride film, can selectively fine-process the silicon dioxide film. Also provided is a fine-processing method utilizing the fine-processing agent. The fine-processing agent is characterized by including: (a) 0.01-15.0 weight% hydrogen fluoride and/or 0.1-40.0 weight% ammonium fluoride, (b) water, and (c) 0.001-10.00 weight% water-soluble polymer selected from among a group consisting of acrylic acid, ammonium acrylate, acrylic acid ester, acrylamide, styrenesulfonic acid, ammonium styrenesulfonate, and ester styrenesulfonate.