| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow-through washing method and flow-through washing apparatus which efficiently remove dust sticking to the surface of a substrate and prevent dust from sticking to the surface of the substrate again after washing. SOLUTION: The flow-through washing method runs washing liquid L inside a washing tank 2 in the lateral direction, and applies an ultrasonic vibration to the washing liquid L in a state in which an object W to be washed is immersed in this washing liquid L, while washing this object W. By regulating the flow rate of the washing liquid L flowing in any of the feed ports 3 and/or discharge ports 5 of a plurality of feed ports 3 which feed the washing liquid L to the washing tank 2 and plurality of discharge ports 5 which discharge washing liquid L from the washing tank 2, the washing liquid L inside the washing tank 2 can be set so as to run in a laminar flow state. COPYRIGHT: (C)2011,JPO&INPIT |
