| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation system capable of aligning a moving direction of a stage with a moving direction of an observation image by a simple method. SOLUTION: The observation system includes: an X axis 21 extending in an X direction; a Y axis 22 extending in a Y direction; a stage 2 guided by the X axis 21 and the Y axis 22 to be movable, and provided with a level difference S in parallel with the X axis 21 on a placing surface on which a work is placed; and motors 41 and 42 moving the stage 2 in an optional direction. The observation system includes: a camera 71 imaging the work placed on the placing surface; a control drive unit 5 controlling the motors 41 and 42 so that the level difference S may be in visual field of the camera 71; an image processing unit 81 acquiring an index from the captured image; an arithmetic unit 82 obtaining the tilt of the index from the acquired index and calculating a correction coefficient; and a memory 83 storing the calculated correction coefficient. In the observation system, the control drive unit 5 controls the motors 41 and 42 by performing correction using the stored correction coefficient. COPYRIGHT: (C)2011,JPO&INPIT
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