摘要 |
To provide a semiconductor device which achieves a high ON current and a low OFF current at the same time, and a fabrication method thereof. A semiconductor device of the present invention includes a glass substrate 1, an island-shaped semiconductor layer 4 which includes a first region 4c, a second region 4a, and a third region 4c, a source region 5a and a drain region 5b, a source electrode 6a, a drain electrode 6b, and a gate electrode 2 for controlling the conductivity of the first region 4c. The upper surface of the first region 4c is closer to the glass substrate 1 than the upper surfaces of ends of the second region 4a and the third region 4b adjacent to the first region 4c are. The distances between the upper surfaces of the ends of the second region 4a and the third region 4b and the upper surface of the first region 4c along the thickness direction of the semiconductor layer 4 are each independently not less than one time and not more than seven times the thickness of the first region 4b.
|