发明名称 |
REGENERATIVE VACUUM PUMP WITH AXIAL THRUST BALANCING MEANS |
摘要 |
<p>A vacuum pump rotor suitable for use in a vacuum pump is described for a vacuum pump that comprises a regenerative pumping mechanism. The rotor has a generally disc-shaped configuration and is mounted on an axial shaft for rotation relative to a stator of a vacuum pump. The rotor has a first and second opposing surface on which a rotor formations are disposed, each rotor formation defining a portion of a pump stage formed between the pump rotor and a stator for pumping gas from an inlet to an outlet in the same radial direction along the first and second opposing surface. A conduit is provided to interconnect the portions of the pump stage and assist with pressure imbalance that might occur on opposing sides of the rotor.</p> |
申请公布号 |
WO2010133868(A1) |
申请公布日期 |
2010.11.25 |
申请号 |
WO2010GB50803 |
申请日期 |
2010.05.18 |
申请人 |
EDWARDS LIMITED;SCHOFIELD, NIGEL PAUL;LIU, MICHAEL CHUNG KAU |
发明人 |
SCHOFIELD, NIGEL PAUL;LIU, MICHAEL CHUNG KAU |
分类号 |
F04D17/16;F04D23/00;F04D29/051;F04D29/18 |
主分类号 |
F04D17/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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