Electrode for use in e.g. surface acoustic wave component, has electrode material, where concentration of material within electrode monotonously decreases with increasing distance from surface of electrode

摘要

The electrode (El) has an electrode material differing from an electrode metal. The electrode material has a higher diffusion coefficient than the electrode metal, where concentration of the material within the electrode monotonously decreases with increasing distance from a surface of the electrode. The electrode metal is selected from a group consisting of aluminum, copper, silver or gold. An intermediate layer is arranged between the electrode and a substrate (Su) that is made of diamond, silicon, Gallium arsenide, germanium or silicon-germanium composite. An independent claim is also included for a method for manufacturing an electrode.