| 摘要 |
PROBLEM TO BE SOLVED: To improve efficiency of ion beam generation and elongation of life of a hot cathode, in an ion source with the hot cathode of a concentric structure. SOLUTION: The ion source 2 includes a hot cathode 10 with a hollow outer conductor 12, a hollow inner conductor 14 arranged concentrically inside the same, and an annular connection conductor 16 electrically connecting tips of both conductors 12, 14. The hot cathode 10 is inserted into a plasma generating vessel 4 along a length direction of a narrow ion extraction port 6. The ion source 2 further includes a gas supply mechanism supplying raw material gas 8 inside the inner conductor 14 of the hot cathode 10 and releasing it into the plasma generating vessel 4 from the tip of the inner conductor 14. COPYRIGHT: (C)2011,JPO&INPIT
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