| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method for producing high purity silicon fine particles in which the diffusion of an impure metal into the silicon fine particles is prevented. SOLUTION: Disclosed is the method for producing the silicon fine particles by crushing a silicon lump 1, in which the silicon lump 1 is crushed in an oxidizing liquid 4, from which oxygen is released to oxidize silicon, thereby the silicon fine particles are produced by crushing the silicon lump 1 while forming a silicon oxide film on the surface of the crushed silicon fine particle. As a result, since the diffusion of impurities in silicon can be prevented when the silicon lump is crushed, the high purity silicon fine particles can be obtained in which the diffusion of the impure metal is prevented. COPYRIGHT: (C)2011,JPO&INPIT
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