发明名称 MANUFACTURING METHOD OF AN ELECTRONIC DEVICE INCLUDING OVERMOLDED MEMS DEVICES
摘要 A method manufactures an electronic device comprising a MEMS device overmolded in a protective casing. The MEMS device includes an active surface wherein a portion of the MEMS device is integrated, and is sensitive, through a membrane, to chemical/physical variations of a fluid. Prior to the molding step, at least one resin layer is formed on at least one region overlying the active surface in correspondence with the membrane. After, at least one portion of at least one resin layer is removed from at least one region, so that in the region an opening is formed, through which the MEMS device is activated from the outside of the protective casing.
申请公布号 US2010297797(A1) 申请公布日期 2010.11.25
申请号 US20100848730 申请日期 2010.08.02
申请人 STMICROELECTRONICS S.R.L. 发明人 ZIGLIOLI FEDERICO GIOVANNI;SHAW MARK ANDREW
分类号 H01L21/56 主分类号 H01L21/56
代理机构 代理人
主权项
地址