发明名称 ACTUATOR
摘要 An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.
申请公布号 US2010295486(A1) 申请公布日期 2010.11.25
申请号 US20100845921 申请日期 2010.07.29
申请人 IKEHASHI TAMIO 发明人 IKEHASHI TAMIO
分类号 G05D1/02;H01L37/00 主分类号 G05D1/02
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