| 摘要 |
Spectrum detection is performed at a high S/N ratio, high sensitivity, and high speed. Provided is a scanning microscope device that includes a light source that irradiates a sample with laser light; an X-Y galvanometer mirror that scans the laser light from the light source on the sample; an objective lens that irradiates the sample with the laser light scanned by the X-Y galvanometer mirror and collects fluorescence generated at an irradiated position of the laser light; a non-descan-detection excitation DM that is disposed between the X-Y galvanometer mirror and the objective lens and separates the laser light and the fluorescence from each other; an fiber for epi-fluorescence that receives the separated fluorescence through an entrance end thereof, guides the fluorescence, and emits the fluorescence from an exit end thereof that is formed in a substantially linear shape; a diffraction grating that disperses the fluorescence emitted from the exit end of the fiber for epi-fluorescence in a direction orthogonal to the longitudinal direction of the exit end; and a multi-anode PMT having a plurality of cells arrayed in the dispersing direction of the fluorescence dispersed by the diffraction grating.
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