PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD,申请号KR20107022951-传众专利搜索

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发明名称	PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
摘要
申请公布号	KR20100123765(A)	申请公布日期	2010.11.24
申请号	KR20107022951	申请日期	2009.06.03
申请人	TOKYO ELECTRON LIMITED;TOHOKU UNIVERSITY	发明人	HIRAYAMA MASAKI;OHMI TADAHIRO
分类号	H05H1/46	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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