REPLICATION MOLD FORMING METHOD USING IMPRINT PROCESS

摘要

PURPOSE: A replication mold forming method using an imprint process is provided to improve the productivity and quality of a target to which a duplicated mold is transferred by increasing the completeness and accuracy in manufacturing the depilated mold. CONSTITUTION: A material for a pattern such as a metal and polymer is formed on a master substrate(150). An intaglio and embossment pattern is formed on the master substrate while dry etching or wet etching are performed according to the material formed on the master substrate. The liquid material(160) is formed on the master substrate by using one of dispensing, spin coating, and an ink-jet.